아주대학교

목차

1. Introduction 1
1.1. Motivation 1
1.1.1. Augmented Reality Near-Eye Displays 1
1.1.2. Visual Limitations of Fixed-Focus AR Displays 2
1.1.3. The Eye-box Limitation of Advanced Display Architectures 4
1.1.4. Eye-box Expansion: Pupil Duplication versus Pupil Steering 5
1.1.5. Pupil Steering Approaches 6
1.1.6. Requirements for a Steering Mirror in Wearable AR Glasses 8
1.2. Challenges in steering mirror for AR glasses 9
1.2.1. Electrostatic MEMS mirror 11
1.2.2. Electromagnetic MEMS mirror 13
1.2.3. Piezoelectric MEMS mirror 15
1.2.4. Comparison of DEA with MEMS Actuation Methods 17
1.3. Objective and contribution 18
1.3.1. Dielectric Elastomer Actuators for Mirror Steering 18
1.3.2. Research Objectives and Contributions 21
2. Overview of DEA-based mirror steering system 24
2.1. System Requirements for Pupil Steering 24
2.2. Overall architecture 28
2.3. Operating Principle of DEA-driven Flexure Mechanism 31
3. Steering actuator design 34
3.1. Design of the Multi-layer Dielectric Elastomer Actuator 34
3.1.1. Material Selection 34
3.1.2. Geometric Design and Layout 37
3.2. Design of Flexure-based Mechanism 39
3.2.1. Structural Configuration and Design Parameters 39
3.2.2. Minimization of Mass Moment of Inertia 41
3.2.3. Stiffness Tuning and Force Compensation for Rapid Settling 42
3.3. Fabrication Strategy for Multi-layer Actuator 44
3.4. Fabrication process of the Actuator 47
3.4.1. Silicone Film Preparation and Laser Patterning 48
3.4.2. Electrode Spray Coating 50
3.4.3. O₂ Plasma Dry Stacking 52
3.4.4. Pre-stretching and Frame Integration 54
3.4.5. Mechanism Fabrication and Module Assembly 56
3.5. Performance characterization of mirror steering actuator 57
3.5.1. Electromechanical Characterization of the Planar Multi-Layer Actuator 57
3.5.2. Static and Dynamic Characterization of the Mirror Steering Actuator 61
4. Sensor and Driving Circuit Design 65
4.1. Development and Characterization of the Angle Sensor 65
4.1.1. Sensor Requirements and Modality Selection 65
4.1.2. Differential Sensing Principle and Configuration 68
4.1.3. Electrode Geometry Optimization 70
4.1.4. Fabrication and Integration Process 73
4.2. High-Voltage Driving Architecture 75
4.2.1. Circuit Design and Timing Control Strategy 75
4.2.2. Experimental Validation of Dynamic Response 80
5. Tracking Control Strategy 83
5.1. System Requirements and Control Architecture 83
5.2. Design of Feedforward-Feedback Controller 84
5.3. Experimental Evaluation of Tracking Performance 86
6. Conclusion 88
References 90