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Fabrication of nanostructure-based strain sensor with improved sensitivity and reproducibility

향상된 민감도와 제작 재현성을 갖춘 나노구조 기반 스트레인 센서 제작

목차

Chapter I. Introduction 1
I.1 Nanostructure-based strain sensor 1
I.1.1 Deep crack-based strain sensor 1
I.1.2 Nanogap-based strain sensor 2
Chapter II. Deep crack-based strain sensor 4
II.1 Design and characterization of the deep crack-based strain sensor 4
II.1.1 Sensor design methodology 4
II.1.2 Parametric analysis of the deep crack-based strain sensor 11
II.1.3 Electromechanical characteristics of the deep crack-based strain sensor 21
II.2 Materials and Methods 27
II.2.1 Fabrication of the deep crack-based strain sensor 27
II.2.2 Characterization of the deep crack-based strain sensor 28
Chapter III. Nanogap-based strain sensor 29
III.1 Design and characterization of the nanogap-based strain sensor 29
III.1.1 Sensor design methodology 29
III.1.2 Electromechanical characteristics of the nanogap-based strain sensor 36
III.1.3 Parametric analysis of the nanogap-based strain sensor 43
III.2 Materials and Methods 50
III.2.1 Fabrication of the nanogap-based strain sensor 50
III.2.2 Characterization of the nanogap-based strain sensor 52
Chapter IV. Discussion and Conclusion 53
References 55

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