아주대학교

목차

Chapter 1. Introduction 1
1.1 Overview of functional nanostructures 1
1.2 Soft-lithography 8
1.3 Transfer printing 14
1.4 Objectives 19
Chapter 2. Fabrication of micro/nano structured sacrificial molds via soft lithography 20
2.1 Introduction 20
2.2 Experimental 22
2.2.1 Preparation of UV-curable PUA molds for mold replication 22
2.2.2 Method for preparing polymer solution and making sacrificial mold 22
2.3. Results and discussion 24
2.4 Conclusions 38
Chapter 3. Fabrication of metal/metal oxide nanostructures by thermal evaporation using sacrificial molds 39
3.1 Introduction 39
3.1.1 Thermal deposition 41
3.2 Experimental 45
3.2.1 Preparation of the sacrificial molds 45
3.2.2 Thermal evaporation process using a sacrificial mold as a substrate 45
3.2.3 Delamination and lift-off process of the thermally deposited thin film 45
3.2.4 Preparation of slab PDMS for transfer printing 46
3.3 Results and discussion 47
3.3.1 Schematic of fabrication process for nanostructures 47
3.3.2 Surface morphology of metal/metal oxide 51
3.3.3 Optimized process for fabricating functional nanostructures 56
3.3.4 Fabrication of highly ordered nanostructures via transfer printing 58
3.3.5 Development process for advanced nanostructures 63
3.3.6 Application as a functional nanostructure 68
3.4 Conclusions 86
Chapter 4. Fabrication of nanostructures based on solution process 87
4.1 Introduction 87
4.1.1 Sol-gel synthesis 88
4.2 Experimental 89
4.2.1 Preparation of P3HT, PMMA solution and spin coating process 89
4.2.2 Preparation of ZnO precursor 90
4.2.3 ITO particle array via polymeric stencil 90
4.3 Results and discussion 91
4.3.1 Fabrication of polymer nanostructures via spin coating 91
4.3.2 Application of PMMA membrane 98
4.4 Conclusion 101
Chapter 5. Conclusions and future work 102
5.1 Conclusions 102
5.2 Future work 104
Bibliography 105
Abstract (국문초록) 118