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전극재료에 따른 대기압 플라즈마 방전특성

Characteristics of atmospheric pressure plasma discharge according to electrode materials

초록/요약

Electrodes in atmospheric-pressure plasma dispensing devices are essential for plasma generation. Depending on the material of the electrode, the discharge characteristics of the plasma and the amount of the active species may vary. Recently, studies on the generation volume and rate of active species are ongoing through changes in the material and structure of electrodes in atmospheric pressure plasma. In this paper, three types of plasma electrodes with different materials were developed to improve the life and discharge area of plasma discharged through the Atmosperic pressure plasma jet used in this lab. The first electrode was made using a p+silicon wafer with boron doped. The second electrode was made using stainless steel substrates, and the third electrode was made by ceramic coating on to the stainless steel electrode. All electrodes are made using a micro-machining process. The experiment was conducted using air gas and nitrogen gas. In addition, the experiment identified the generation volume of active species using UV-intensity and The experiment was conducted using air gas and nitrogen gas. In addition, the experiment identified the generation volume of active species using UV intensity and Optical emission spectrum measurements of plasma, which are discharged according to the materials of gas and electrodes, also we measured the power consumption generated during the experiment according to each gas and electrode. In addition, the amount of Ozone and NO generated during the experiment was measured to determine if plasma jets could be applied to the medical-biological field. Finally, through experiments, we could compare the life time for each electrode by checking how uniform and stable discharge for each of the three electrodes produced using different materials is sustained during plasma injection.

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목차

제 1장 서 론 1

제 2장 플라즈마의 발생원리 6
제 1. 글로우 방전의 원리 6
제 2. 글로우 방전 발생 영역 8
제 3. 파센의 법칙 10

제 3장 저온 대기압 플라즈마 제트 장치 13
제 1. 플라즈마 제트 장치 구조 및 설명 13
제 2. 플라즈마 전극의 중요성 15
제 3. 각 전극별 제작 과정 및 구조 16

제 4장 플라즈마 제트 장치의 실험 방법 20

제 5장 전극에 따른 플라즈마 제트 장치 실험 결과 22
제 1. 각 전극별 방전 형태 22
제 2. 실리콘 전극 실험 24
제 3. 스테인리스 강 전극 실험 31
제 4. 세라믹을 코팅한 스테인리스 강 전극 실험 36
제 5. 실험 결과 및 각 전극의 수명 비교45

제 6장 결 론 51

참고문헌 52

Abstract 56

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