Thermochromic Characteristics of Vanadium Dioxide by Metal Oxide Co-sputtering
Thermochromic Characteristics of Vanadium Dioxide by Metal Oxide Co-sputtering
- 주제(키워드) Thermochromic , Vanadium Dioxide , Co-sputtering
- 발행기관 아주대학교
- 지도교수 고경현
- 발행년도 2016
- 학위수여년월 2016. 2
- 학위명 박사
- 학과 및 전공 일반대학원 에너지시스템학과
- 실제URI http://www.dcollection.net/handler/ajou/000000021727
- 본문언어 영어
- 저작권 아주대학교 논문은 저작권에 의해 보호받습니다.
초록/요약
The main characteristics of smart window was a selective blocking of infrared light. Vanadium dioxide has a phase transformation characterisitics between insulated state with transparent property and metallic state with reflective property to infrared light at specific temperature. So, vanadium dioxide was the best choice for a smart window. The vanadium oxide thin film was deposited by RF sputtering system. The V2O5 target and several oxide target (TiO, Cr2O3, WO3, Fe2O3, NiO, CuO, Al2O3) was selected. The crystal structure of vanadium oxide was determined by the deposition parameter or additional cation effect. Valence of vanadium ion was proportional to working pressure. The role of additional cation was the formation of compound (Ti, Cu), doping (Cr, Fe, Al), and amorphization (W, Ni). The effect of cation addition was reduction (Ti, Cr, Fe, Al) and oxidation (Cu) of vanadium ion. The effect of metal oxide co-sputtering was 'compound formation', 'amorphization', 'control of oxygen state in chamber', and 'improvement of deposition rate'.
more목차
1. Introduction……………………………………………… 1
2. Background……………………………………………… 2
A. Vanadium oxide……………………………………… 2
B. Vanadium dioxide……………………………………… 6
C. Crystal structure of vanadium dioxide………………… 8
D. Crystal field theory for vanadium dioxide………………… 12
E. Orbital arrangement of VO2(R)…………………………… 16
F. Band diagram of vanadium dioxide……………………………… 18
G. Polymorph of VO2(M)……………………………………… 20
3. Experimental……………………………………………… 23
A. Deposition process……………………………………… 23
B. Analysis of film…………………………………………… 26
C. Heat treatment of film………………………………………… 28
4. Results and discussion………………………………………… 29
A. Metal oxide co-sputtering………………………………………… 29
B. Metal oxide co-sputtering with modified parameter……………………………… 72
C. Special case ― Nickel oxide co-sputtering………………………………… 95
5. Conclusions…………………………………………… 112
6. Bibliography……………………………………………… 113
