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고내충격용 전술급 MEMS 진동형 자이로스코프 연구

Study on Tactical Grade MEMS Vibrating Ring Gyroscope with High Shock Reliability

초록/요약

This study presents a MEMS vibrating ring gyroscope (VRG) which is expected to survive high shocks and maintain the performance required for the tactical navigation there after.The mechanical structure was designed with a combination of the mathematical analysis and the finite element method. The high-aspect-ratio structures were realized efficiently based on the fabrication process using the silicon-on-aluminum patterned glass(SOPG) wafer.A high shock of 15,000g was applied to the fabricated VRG by agas-gun andits performance parameters were measured to demonstratethe high shock resistance.

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목차

Chapter I. Introduction 1
1.1 Motivation 2
1.2 Review of gyroscope 6
1.2.1 Overview of mechanical gyroscope 8
1.2.1.1 The single-axis rate gyroscope 9
1.2.1.2 Dynamically tuned gyroscope 11
1.2.2 Overview of opticalgyroscope 13
1.2.2.1 Ring Laser Gyroscope 13
1.2.2.2 Fiber optic Gyroscope 15
1.2.3 Overview of MEMS gyroscope 17
Chapter Ⅱ. Design Analysis 21
2.1 Objective 22
2.2 Mathematical formulation 25
2.3 Finite element analysis 30
2.4 High-g analysis 34
2.4.1 Z-direction high-g simulation not contact 38
2.4.2 Anti Z-direction high-g simulation (for contact) 41
2.4.3 X-direction high-g simulation 44
2.5Electrode design 48
2.5.1 Electrode modeling 48
2.5.2 Effect of noise in electrode 52
Chapter Ⅲ. Fabrication 57
3.1 Fabrication Process Overview 58
3.1.1 SOPG (Silicon-On-aluminum Patterned Glass) 60
3.1.2 High aspect-ratio silicon fabrication technologies 68
3.1.3 Vacuum packaging 72
3.1.4 Vacuum packagingreliability 82
Chapter Ⅳ. ExperimentResult 85
4.1 Dynamic characteristic test 86
4.2 Performance and noise test 89
4.3 High-g test 100
Chapter Ⅴ. Application 105
5.1 Introduction 106
5.2 MEMS-IMU/GPS Integrated Navigation System 107
5.3 Results 108
Chapter Ⅵ. Conclusions 117
APPENDIX 119
REFERENCE 123
PUBLICATION LIST 130

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