목차

Chapter 1: INTRODUCTION
1.1 Thesis overview. ...…………………………………………..……………......... 2
1.2 Introduction to Carbon nanotubes…….…………………………………………..2
1.3 Motivations and Research Objectives……………………….……………………3

Chapter 2: CARBON NANOTUBES SYNTHESIS
2.1 Synthesis of carbon nanotubes by HFCVD: Introduction………………………10
2.2 Catalyst preparation
2.2.1 Catalyst sputtering. ………….…………….……………………………..11
2.2.2 Catalyst dip-coating. ……………………….……………………………13
2.3 Catalyst pretreatment …………………………………………………………...14
2.3.1 Plasma treatment…………………………………………………………14
2.3.2 Thermal annealing ……………………………………………………....15
2.4 HFCVD chamber………………………………………………………………..17
2.4.1 Filament carburization…………………………………………………...19
2.4.2 Chemical vapor deposition………………………………………………20

Chapter 3: CARBON NANOTUBES GROWTH
3.1 CNT growth on bare silicon substrate………………..…………………………22
3.2 CNT growth from buffer layers underlined catalyst…..………………………...25
3.2.1 CNTs growth on iron catalyst underlined by Al, Al2O3, SiO2………….. 25
3.2.2 CNTs growth on dip-coated catalyst……………………………………..31
3.3 CNT properties…………………………………………………………………..33
3.3.1 Thermo-gravimetric analysis (TGA) ……………………………………33
3.3.2 Electron-microscopy image of CNTs…...……………………………….35
3.3.3 Raman spectroscopy and TEM ……….…………………………………40
3.4 Patterned growth
3.4.1 Patterned CNTs using lithography and lift-off technique………………..43
3.4.2 CNT patterning by femtosecond laser machining…..……………………49
3.5 Growth mechanism
3.5.1 Introduction………………………………………………………………53
3.5.2 Initial growth with Arrhenius-type temperature dependence……………55
3.5.3 Combined model of growth: ………………………………….. ……......58

Chapter 4: CNTs APPLICATIONS IN FIELD ELECTRON EMISSION
4.1 Introduction…….....……………………………………………………………..67
4.2 Field emission measurement….…………………………………………………68
4.3 Field electron emission from pristine VACNTs ……………………………......70
4.3.1 Field emission from dense aligned MWCNT films.……………………..71
4.3.2 Field emission from CNTs arrays/silicon substrate……………………...75
4.4 Effects of cathode geometry on field emission………………………………….79
4.4.1 Edge effect of single CNT structure……………………………………..79
4.4.2 FE properties of the solid and the annular CNT-column………………...83
4.5 Mutual local electric shielding effect……...…………………………………….85
4.5.1 Effect of VACNT-column arrangement on the cathode…………………85
4.5.2 Field emission of practical CNT-column arrays…………………………90
4.5.3 Effect of CNT inter-column spacing on field emission………………….95
4.6 Field emission from VACNTs arrays patterned by femtosecond laser..........................................................................................…………………….100
4.6.1 Field emission of single CNT-tip made by laser machining……………102
4.6.2 Field emission of CNT-tip arrays……………………………………….104
4.7 Field emission from VACNTs transferred on conducting substrates………….110
4.8 Field emission from PDMS based flexible emitters ……………………...…...115
4.8.1 Introduction…………………………………………………………….115
4.8.2 Fabrication……………………………………………………...………115
4.8.3 FE measurement………………………………………………………..120

Chapter 5: SUMMARY AND FUTURE WORK
5.1 Summary……………………………………………………………………….125
5.2 Future work…………………………………………………………………….128
Appendix …………………………………………………………………………..131
References………………………………………………………………………….133