목차

TABLE OF CONTENTS
ABASTRACT i
TABLE OF CONTENTS iii
LIST OF FIG-URES vi
LIST OF TABLES x
CHAPTER 1 INTRODUCTION AND BACK-GROUND 1
1.1 Genral introduction and back-ground 1
1.2 Polymer based process in micro fabrication 2
1.3 Micro thermal imprint process for pattern replication of amorphous polymer 3
1.4 Motivation and objective 7
1.5 Scope of study 8
CHAPTER 2 LITERATURE SURVEY STUDY 10
2.1 Nanoimprint lithography process 10
2.2 State-of-the-art of micro thermal imprint process based on amorph-ous polymer 11
2.2.1 Process development and application in various areas 13
2.2.2 Material flow behavior and Process analysis 25
2.2.3 Mold fabrication 33
2.2.4 FEM numerical simulation of the process 34
2.2.5 Roller-type micro thermal imprint for large area pattern repli-cation 37
2.3 Summary 41
CHAPTER 3 MATERIAL PROPERTY OF GLASSY POLYMER NEAR THE GLASSY TRANSITION TERMPERA-TURE 43
3.1 Introduction of viscoelatic property of glassy polymer near the glass transition temperature 43
3.1.1 Three stages of amorphous polymer material deformation 44
3.1.2 Time dependence based on viscoelastic “mechanical analogy” model 46
3.1.3 Time-temperature correspondence 48
3.2 Experiment study of material behavior near glassy transition tem-perature 50
3.2.1 Experiment setup and sample preparation 50
3.2.2 Tensile stress relaxation test 52
CHAPTER 4 FLAT TYPE MICRO THERMAL IMPRINT PROCESS 57
4.1 Introduc-tion 57
4.2 Experimental work 58
4.2.1 Experiment setup 58
4.2.2 Substrate and mold 61
4.2.3 Process condition design 63
4.2.4 Experiment result measurement 65
4.3 Results and discussion 67
4.3.1 Experimental study of replication of semi-pyramidal pat-tern 67
4.3.1.1 Process analysis based on Taguchi method 69
4.3.2 Numerical study of micro thermal imprint process 77
4.3.2.1 FE model development 77
4.3.2.2 Parametric study of thermal imprint process 79
4.4 Summary 82
CHAPTER 5 FLAT TYPE MICRO THERMAL IMPRINT PROCESS 84
5.1 Introduc-tion 84
5.2 System development and process design 85
5.2.1 Development of Roll-to-Flat micro thermal imprint sys-tem 85
5.2.2 Process design and control parameters 88
5.3 Roll-to-Flat thermal imprint process for large area micro pattern replication 90
5.3.1 Flat mold and substrate preparation 90
5.3.2 Experiment result 91
5.4 Analysis of Roll-to-Flat thermal imprint process 95
5.4.1 Process parameter study 95
5.4.2 Investigation of replication uniformity 99
5.5 Discussion 100
5.6 Summary 101
CHAPTER 6 CONCLUSION AND FUTURE WORK 102
6.1 Conclusions 102
6.2 Future works 104
BIBLIOGRAPHY 106