ITO 전극 형성 방법이 청색 발광 다이오드의 전기광학적 특성에 미치는 영향
Influence of ITO-Electrode Deposition Method on the Electro-optical Characteristics of Blue LEDs
초록/요약
ITO 전극 제조방법은 전기적·광학적 성질에 영향을 미치며, 또한 청색 발광 다이오드(λ=469nm) 소자의 신뢰성과도 연관되어 있다. ITO 전극을 Electron Beam Evaporation법과 Sputtering법, 그리고 Electron Beam Evaporation법으로 선 증착 후에 Sputtering법으로 증착한 Hybrid법 3가지 방법을 사용하여 청색 발광 다이오드를 제작하여 ITO 박막의 전기적·광학적 특성을 고찰하였다. 세가지 다른 방법으로 증착한 ITO를 적용한 청색 발광 다이오드의 aging 특성을 확인하기 위해 V-log I, V-log IPH 특성, I-IPH , dIPH/dI 특성, 그리고 I-IPH, I-V, dV/dI 특성을 조사하였다.
more목차
제 1 장 서론 ········································································· 1
제 2 장 이론적 배경 ···························································· 3
제 1절 투명 전도막의 특성·············································· 5
제 3 장 ITO 증착 방법에 따른 청색 발광다이오드의
aging 특성 고찰 · 10
제 1절 ITO 증착 방법 및 실험 방법 ···························· 10
제 2절 전기적, 광학적 분석 ······································· 14
제 3절 실험결과 ·························································· 16
제 4절 요약 ······································································ 31
제 4 장 Electron Beam Evaporation으로 증착된 ITO 박막의
전기적, 광학적 특성과 원재료에 대한 의존성 연구 ·········· 33
제 1절 실험 방법 ············································ 33
제 2절 박막 분석 방법 ········································ 34
제 3절 실험결과 ··················································· 36
제 4 절 요약 ···································································· 49
제 5 장 결론 ······································································ 50
참고 문헌 ········································································· 53
